Features
• Complete integration with tool control system • Setup, operation, & maintenance are controlled using existing tool or IonMonitor software GUI
• Fully adjustable parameters for each AeroBar • Fine-tune ionization for individual process
requirements in each area of the tool
• Ion current monitoring • More consistent ion output & stable performance
• Several lengths available including 3 specifically designed for EFEMs
• Flexible lengths means versatility for a variety of application designs
• Single-crystal silicon emitter points • Industry’s demonstrated cleanest emitter material, with no risk of wafer contamination from dopants or metals |